Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy

Demidov E. S.; Sdobnyakov V. V.; Vazenmiller G. V.; Chigirinskii Yu. I.; Dudin Yu. A.; Lesnikov V. P.; Trushin V. N.; Boldin M. S.; Belkin O. A.; Bobrov A. A.; Sakharov N. V.

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Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy

机译：含有CO2FESI或CO2MNSI Heusler合金相的溅射复合靶的制造

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The paper presents a method for manufacturing mechanically strong sputtering composite targets containing the phase of the Co2FeSi or Co2MnSi Heusler alloy of the stoichiometric composition, which can be used for fabrication of spin electronic devices by high-frequency magnetron deposition and pulsed laser deposition of thin films.

机译：本文提出了一种制造含有化学计量组合物的CO 2 FESI或CO2MNSI Heusler合金的相位的机械强的溅射复合靶的方法，其可用于通过高频磁控管沉积和薄膜的脉冲激光沉积来制造旋转电子器件。

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《Technical physics》 |2018年第7期|共4页
作者
Demidov E. S.; Sdobnyakov V. V.; Vazenmiller G. V.; Chigirinskii Yu. I.; Dudin Yu. A.; Lesnikov V. P.; Trushin V. N.; Boldin M. S.; Belkin O. A.; Bobrov A. A.; Sakharov N. V.;
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Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

Lobachevsky State Univ Nizhny Novgorod Nizhnii Novgorod 603905 Russia;

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正文语种 eng
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专利

1. Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy [J] . Demidov E. S., Sdobnyakov V. V., Vazenmiller G. V., Technical physics . 2018,第7期

机译：含有CO2FESI或CO2MNSI Heusler合金相的溅射复合靶的制造
2. Microwave ferromagnetic properties of as-deposited Co2FeSi Heusler alloy films prepared by oblique sputtering [J] . Cao Xiao-Qin, Li Shan-Dong, Cai Zhi-Yi, 中国物理：英文版 . 2014,第008期

机译：倾斜溅射制备的Co2FeSi Heusler合金薄膜的微波铁磁性能
3. Characterization of Heusler alloy thin film, Cu2MnAl and Co2MnSi, deposited by co-sputtering method [J] . Kim K, Kwon SJ, Kim TW Physica status solidi, B. Basic research . 2004,第7期

机译：共溅射沉积Heusler合金薄膜Cu2MnAl和Co2MnSi的表征
4. MECHANICAL JOINING OF ALUMINUM ALLOYS FOR MANUFACTURING OF SPUTTERING TARGETS [C] . E. Ivanov, D. Smathers Ninth Annual International Conference on Composites Engineering ICCE/9 Jul 1-6, 2002 San Diego, California . 2002

机译：机械溅射铝合金制造溅射靶材
5. The fabrication of heusler alloy thin films from multiphase targets using pulsed laser deposition. [D] . Patton, Heather M. A. 2009

机译：使用脉冲激光沉积从多相靶材制造Heusler合金薄膜。
6. Competition between cubic and tetragonal phases in all-d-metal Heusler alloys X2−xMn1+xV (X = Pd Ni Pt Ag Au Ir Co; x = 1 0): a new potential direction of the Heusler family [O] . Yilin Han, Mengxin Wu, Yu Feng, 2019

机译：全金属Heusler合金中立方相和四方相之间的竞争X2-xMn1 + xV（X = PdNiPtAgAuIrCo; x = 10）：Heusler族的新势能方向
7. Generation and Detection of a Pure Spin Current using Co-Based Heusler-Alloy Spin Injector and Detector: Comparison of Co2MnSi and Co2FeSi [O] . S. Oki, M. Kawano, K. Tanikawa, 2016

机译：使用Co基Heusler合金自旋注射器和探测器产生和检测纯自旋电流：Co2mnsi和Co2Fesi的比较

Manufacturing of Sputtering Composite Targets Containing Phases of Co2FeSi or Co2MnSi Heusler Alloy

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