. After this, by differentiating cumulative structure function C(R) reveal areas of its sharp growth and determine components of thermal resistance of high-power semiconductor devices.;EFFECT: increased accuracy.;1 cl, 4 dwg"/> METHOD OF MEASURING COMPONENT OF THERMAL RESISTANCE OF POWERFUL SEMICONDUCTOR INSTRUMENTS
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METHOD OF MEASURING COMPONENT OF THERMAL RESISTANCE OF POWERFUL SEMICONDUCTOR INSTRUMENTS

机译:功率半导体仪表热阻的测量方法

摘要

FIELD: electricity; measurement technology.;SUBSTANCE: invention relates to technique for measuring thermophysical parameters of semiconductor devices and can be used to monitor their quality. For this, method consists in passing through powerful semiconductor device a sequence of N pulses of heating current of given amplitude Igr, duration of which is increased by logarithmic law. For each i-th current pulse, based on the measurement of temperature-sensitive parameter UTSP determine temperatures of p-n slope Tj(ti) and Tj(ti+1) before and after formation of i-th current pulse, respectively, and also measure voltage drop Ugr on the object while passing current pulse through it. Then, cumulative structure function C(R) is calculated by the formulas: . After this, by differentiating cumulative structure function C(R) reveal areas of its sharp growth and determine components of thermal resistance of high-power semiconductor devices.;EFFECT: increased accuracy.;1 cl, 4 dwg
机译:领域:电力;测量技术:本发明涉及用于测量半导体器件的热物理参数的技术,并且可以用于监测其质量。为此,该方法包括使N个加热电流脉冲序列通过给定幅度I gr 的强大的半导体器件,其持续时间根据对数律而增加。对于每个第i个电流脉冲,基于对温度敏感的参数U TSP 的测量,确定pn斜率T j (t i )和T j (t i + 1 )分别在第i个电流脉冲形成之前和之后,并测量电压降U gr ,同时使电流脉冲通过对象。然后,通过以下公式计算累积结构函数C (R ):。此后,通过微分累积结构函数C (R )揭示其急剧增长的区域并确定大功率半导体器件的热阻成分。精度更高;; 1 cl,4 dwg

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