Illumination optics, measuring system for characterizing at least one component of an exposure system and method for characterizing at least one component of an exposure system

摘要

Illumination optics (3) for guiding a light radiation (18) of a light source (2) onto an object plane (4), in particular for guiding an EUV radiation, wherein the illumination optics (3) is designed to form a planar light radiation (18) of the light source (2) to focus in at least two light channels (11) and to direct the two light channels (11) to at least two predetermined field points (10) in an object plane (4), the illumination optics directing at least two arrays (13, 15) of light And wherein a membrane (17) with openings (19) is provided, and wherein the membrane (17) between the arrays (13, 15) is arranged, wherein the elements (14) of the first array ( 13) direct the light channels (10) through the openings (19) of the membrane (17) to the elements (16) of the second array (15), wherein the second array (15) is arranged in an object plane (4), and wherein the elements (16) of the second array (15) the light channels (10) through the Open openings (19) of the membrane (17) in the direction of an image plane (6).