Clean room lighting based on LEDs

摘要

A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in the sizes T5 and T8) has a light engine with a first light source, which is adapted to emit light in the wavelength range above about 500 nm, and a second light source, which is adapted to emit light in a different wavelength range than the first light source. The first light source generates light in a spectral range in which photoresists used in photolithography are insensitive. The second light source produces white light (alone or in combination with the first light source).