METHOD FOR CONTROLLING CONVECTION PATTERN OF SILICON MELT, METHOD FOR MANUFACTURING SILICON SINGLE CRYSTAL AND APPARATUS FOR PULLING SILICON SINGLE CRYSTAL

摘要

To provide a method for controlling the convection pattern of a silicon melt, capable of suppressing a variation in oxygen concentration for each silicon single crystal.SOLUTION: A method for controlling the convection pattern of a silicon melt comprises the steps of: heating a silicon melt 9 in a quartz crucible 3A using a heating part 17 having heating abilities different on both sides sandwiching a virtual line 9C passing the central axis 3C of the quartz crucible 3A when viewing the quartz crucible 3A from above in the vertical direction and parallel to the central magnetic field line 14C of a horizontal magnetic field; and applying the horizontal magnetic field to the silicon melt 9 in the rotating quartz crucible 3A and fixing the direction of convection on a plane orthogonal to the application direction of the horizontal magnetic field in the silicon melt 9 to one direction by applying a horizontal magnetic field of 0.2 tesla or more.SELECTED DRAWING: Figure 2