High precision imaging colorimeter with specially designed pattern closed loop calibration assisted by a spectrometer

摘要

The present invention provides a wide band colorimeter that can have more accurate output. A narrow band instrument, such as a spectrometer or spectrometer, can be used to calibrate a broadband colorimeter. In one embodiment, an optical inspection system can be used that includes both a wide band colorimeter and a narrow band spectrometer. As an example, a spectro-camera, which is a hybrid system comprising both a broad band colorimeter and a narrow band spectrometer, can be used for simultaneous measurement with both the wide band colorimeter and the narrow band spectrometer. Simultaneous inspection can achieve accurate calibration of the broadband colorimeter. In addition, mathematical models can be used to characterize the wide band three channel colorimeter with a narrow band multi-channel spectrometer. [Selected figure] Figure 8