SINGLE-SIDE POLISHING HEAD WITH RECESS AND CAP AND HAVING CENTER FLEXIBLE PORTION

摘要

To provide a polishing head assembly for single-side polishing capable of controlling the flatness of a silicon wafer.SOLUTION: A single-side polishing machine 100 has a head assembly 130 that includes a polishing head and a cap. The polishing head has a recess along the lower portion, and the recess has a concave surface. The cap is disposed in the recess and has an annular wall and a floor extending across the annular wall. The floor is spaced from the concave surface to form a chamber between the concave surface and the floor. The chamber is configured to be pressurized to deflect the floor. The annular wall is attached to the polishing head with an adhesive.SELECTED DRAWING: Figure 1