Single-side polishing head with recess and cap, flexible in the center

摘要

A polishing head assembly for single-side polishing of a silicon wafer is provided. The polishing head assembly includes a polishing head and a cap. The polishing head has a recess along the lower portion, and the recess has a concave surface. The cap is disposed in the recess and has an annular wall and a floor extending across the annular wall. The floor portion is spaced from the concave surface to form a chamber between the concave surface. The chamber is configured to be pressurized to deflect the floor. The annular wall is attached to the polishing head with an adhesive.