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Centrally flexible single-side polishing head having recess and cap
Centrally flexible single-side polishing head having recess and cap
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机译:具有凹口和盖的中央柔性单面抛光头
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摘要
A polishing head assembly for single side polishing of silicon wafers is provided. The polishing head assembly includes a polishing head and a cap. The polishing head has a recess along a bottom portion, the recess having a recessed surface. The cap is positioned within the recess, and has an annular wall and a floor extending across the annular wall. The floor is spaced from the recessed surface to form a chamber therebetween. The chamber is configured to be pressurized for deflecting the floor. The annular wall is attached to the polishing head with an adhesive.
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