ABRASIVE MATERIAL MIXED LIQUID POLISHING DEVICE, POLISHING METHOD WITH USE THEREOF, AND LAMINATED WIRE MESH FILTER FOR SEPARATION OF ABRASIVE GRAIN IN ABRASIVE MATERIAL MIXED LIQUID POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an abrasive material mixed liquid polishing device which has a high durability and is industrially practicable, and a polishing method with use thereof.;SOLUTION: One of a pair of storage tanks 3, which are connected to one opening 2a and the other opening 2b of a metal mold hollow part 2 respectively, is increased in pressure, an abrasive material mixed liquid is forcibly flown into the metal mold hollow part 2, the forcibly in-flown abrasive material mixed liquid is returned to the other storage tank 3. At this time, abrasive grains in the abrasive material mixed liquid are separated by abrasive grain separation means 8, and are not flown into a pressure reduction side fluid channel 7 which is communicated with the abrasive grain separation means 8 and a pressure reduction side fluid pressure generating cylinder 4c. Further, by polishing an inside surface of the metal mold hollow part 2, inevitably generated metal scraps are flown into the pressure reduction side storage tank 3 together with the abrasive material mixed liquid, are precipitated in the storage tank 3 and are adsorbed by metal scrap adsorption means.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2019,JPO&INPIT