机译:静电自组装法制备复合磨料及其在Cu CMP中的抛光性能
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry of Education&Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China;
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry of Education&Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China;
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry of Education&Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China;
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry of Education&Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China;
Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology of Ministry of Education&Zhejiang Province,Zhejiang University of Technology,Hangzhou 310014,China;