Method and system for spin coating multilayer thin films with liquid-saving features

摘要

A system for holding a spin coating fluid when forming a thin film includes a rotary chuck, a substrate having an inner region and an outer peripheral edge on the rotary chuck, and a fluid holding wall on the outer peripheral edge of the substrate, The fluid retaining wall is configured to retain spin coating fluid deposited on the interior region of the substrate during rotation of the rotary chuck.