METHODS AND SYSTEMS FOR SPIN-COATING MULTI-LAYER THIN FILMS HAVING LIQUID CONSERVATION FEATURES

摘要

A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.