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Methods and systems for spin-coating multi-layer thin films having liquid conservation features
Methods and systems for spin-coating multi-layer thin films having liquid conservation features
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机译:旋涂具有液体保留特征的多层薄膜的方法和系统
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摘要
A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
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