VERTICAL RESONANCE TYPE SURFACE EMITTING LASER AND MANUFACTURING METHOD OF VERTICAL RESONANCE TYPE SURFACE EMITTING LASER

摘要

To provide a vertical resonance type surface emitting laser capable of providing higher modulation by utilizing a semiconductor region between an active layer and a distributed Bragg reflection stacked layer.SOLUTION: A vertical resonance type surface emitting laser includes an active layer, a first laminate for a first distributed Bragg reflector, and a first intermediate region provided between the active layer and the first laminate, and the first laminate, a first portion of the first intermediate region, a second portion of the first intermediate region, and the active layer are sequentially arranged in the direction of the first axis, and the first portion and the first laminate include a first dopant, the concentration of the first dopant in the active layer is less than 1×10cm, the first portion is provided from the first laminate to the second portion, the second portion is provided from the active layer to teh first portion, the concentration of the first dopant in the first stack is greater than the concentration of the first dopant in the first portion, and the concentration of the first dopant in the first portion is higher than the concentration of the first dopant in the second portion.SELECTED DRAWING: Figure 1