VERTICAL RESONANCE TYPE SURFACE EMISSION LASER, AND METHOD FOR MANUFACTURING VERTICAL RESONANCE TYPE SURFACE EMISSION LASER

摘要

To provide a vertical resonance type surface emission laser that shows the increased reliability.SOLUTION: A vertical resonance type surface emission laser 11 comprises: a substrate 13 having a principal face including a III-V compound semiconductor including Ga and As as a constituting element; and a post 15 provided on the principal face of the substrate 13. The post 15 comprises: a downside spacer region 17 including a III-V compound semiconductor containing Ga and As as a constituting element; and an active layer 19 having a carbon concentration in a range of 2×10cmor more and 5×10cmor less, and having a quantum well structure provided over the downside spacer region 17. The quantum well structure includes: a well layer 19a having a III-V compound semiconductor containing In as a Group III element; and a barrier layer 19b having a III-V compound semiconductor containing Al and Ga as a Group III element. The downside spacer region 17 is provided between the substrate 13 and the active layer 19.SELECTED DRAWING: Figure 1