FLUID CONTROL APPARATUS, FLUID CONTROL SYSTEM, FLUID CONTROL METHOD, AND, PROGRAM FOR FLUID CONTROL APPARATUS

摘要

To provide a fluid control device capable of stabilizing every time the flow rate of the fluid realized by, for example, pulse control even without improving the temporal control performance, and eliminating waste fluid when supplying the fluid by constituting with one flow path.SOLUTION: A flow control mechanism includes a first pressure feedback control unit for controlling a first valve based on a first pressure measured by a first pressure sensor. The first pressure feedback control unit controls the first valve such that the first pressure measured by the first pressure sensor becomes the target burst pressure while the second valve is closed. The flow control mechanism controls the first valve such that the flow rate of the fluid flowing in the flow path becomes the target constant flow rate after the first pressure becomes the target burst pressure and the second valve is opened.SELECTED DRAWING: Figure 4