Method for determining misalignment of shape measuring device, method for adjusting shape measuring device, program for determining misalignment of shape measuring device, and shape measuring device

摘要

A calibration gauge having plane symmetry is set in a position other than a rotation center of a rotary table. The calibration gauge is measured while the rotary table is driven to rotate. Offset of a measurement axis is determined based on a phase pattern of the rotary table when a stylus head detects the calibration gauge.