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SURFACE SHAPE MEASURING METHOD, MISALIGNMENT AMOUNT CALCULATING METHOD, AND SURFACE SHAPE MEASURING DEVICE

机译:表面形状测量方法,误差量计算方法和表面形状测量设备

摘要

There are provided a surface shape measuring method and a surface shape measuring device which can measure the diameter of a workpiece to be measured with high precision and high reproducibility and have excellent versatility. These method include: acquiring first shape data indicating a surface shape of the workpiece with a detector being disposed on one side across a workpiece while rotating the workpiece relatively to the detector around a rotational center; acquiring second shape data indicating the surface shape of the workpiece with the detector being disposed on the other side across the workpiece while rotating the workpiece relatively to the detector around the rotational center; and calculating a shape parameter defining the surface shape of the workpiece by collating the first shape data and second shape data. In calculating the shape parameter, a deviation of the detector from the reference line is calculated based on the collation result.
机译:提供了一种表面形状测量方法和表面形状测量装置,其能够以高精度和高再现性来测量待测量工件的直径并且具有优异的通用性。这些方法包括:在使工件相对于检测器绕旋转中心旋转的同时,将检测器布置在横跨工件的一侧上,获取指示工件的表面形状的第一形状数据;在使检测器相对于检测器绕旋转中心旋转的同时,将检测器布置在横跨工件的另一侧上,获取指示工件的表面形状的第二形状数据;通过比较第一形状数据和第二形状数据,计算出定义工件表面形状的形状参数。在计算形状参数时,基于核对结果来计算检测器与基准线的偏差。

著录项

  • 公开/公告号US2018149457A1

    专利类型

  • 公开/公告日2018-05-31

    原文格式PDF

  • 申请/专利权人 TOKYO SEIMITSU CO. LTD.;

    申请/专利号US201815879395

  • 发明设计人 HIKARU MASUTA;

    申请日2018-01-24

  • 分类号G01B3/22;G01B5/08;G01B5/20;

  • 国家 US

  • 入库时间 2022-08-21 13:02:39

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