Method for calculating amount of misalignment of surface shape measuring device and surface shape measuring device

摘要

A surface shape measuring method, a misalignment amount calculating method, and a surface shape measuring apparatus capable of measuring the diameter of a workpiece with high accuracy and high reproducibility and enabling measurement with excellent versatility. When a detector is disposed on one side with respect to a workpiece W and the displacement of the surface of the workpiece is detected by the detector while rotating the workpiece and the detector relatively around the rotation center. A first acquisition step for acquiring first shape data indicating the surface shape of the workpiece, and a detector is disposed on the other side of the workpiece, and the workpiece and the detector are relatively rotated around the rotation center. And a second acquisition step of acquiring second shape data indicating the surface shape of the workpiece when the displacement of the surface of the workpiece is detected by the detector. [Selection] Figure 1