Workpiece warpage measuring method and warpage measuring apparatus

摘要

PROBLEM TO BE SOLVED: To provide a technology which is effective for accurately measuring the warpage of a plate-shaped workpiece.SOLUTION: A warpage measurement device 1 comprises a machine platen 10, an illumination device 20 for radiating illumination light, and a camera 30 for photographing a corner part WA of a workpiece W which is placed on an upper face 11 of the machine platen 10 together with a side face 12 of the machine platen 10 from a sideway view point 31. The side face 12 of the machine platen 10 is partitioned into a first detection face 13 continued to the upper face 11, and located at a lower part of the corner part Wa of the workpiece W, and a second detection face 14 continued to the upper face 11, and adjoining the first detection face 13 with respect to a horizontal direction X. Luminosity when viewing both the workpiece W and the machine platen 10 from the sideway view point 31 in an illumination state of the illumination device 20 is set so that the corner part Wa becomes the highest in the workpiece W, and becomes higher than the first detection face 13, and the second detection face 14 becomes higher than the first detection face 13.SELECTED DRAWING: Figure 1