Method for manufacturing composition for rough polishing of silicon wafer, composition set for rough polishing of silicon wafer, and polishing method of silicon wafer

摘要

Problem to be solved: to provide a manufacturing method of a silicon wafer rough polishing composition capable of compatibility of an advantage of a concentrated solution and excellent stability and improving edge roll off.A method of manufacturing a silicon wafer rough polishing composition provided by the present invention is a method of manufacturing a silicon wafer rough polishing composition including abrasive grains, basic compounds and water-soluble polymers.This manufacturing method is: preparing the B liquid containing the abrasive and the basic compound; and preparing the B liquid containing the water-soluble polymer Including steps.