Ellipsometry apparatus and ellipsometry method

摘要

The present invention provides an ellipsometry device and method that can improve measurement efficiency. The method illuminates the object with 45 ° linearly polarized spherical wave illumination light Q (S1), and uses the spherical wave reference light R having a focusing point near the focusing point of the illumination light Q to reflect the reflected light. The object light O that is the light I is acquired as the hologram I _OR , and the hologram I _LR of the reference light R is obtained with the spherical wave reference light L having the same focusing point as the illumination light Q (S2). Each hologram p, each of the s-polarized light hologram ^{_{I κ OR, I κ LR,}} κ = p, is separated into s and treated, to extract the object light wave, the object beam spatial frequency spectrum G κ ^(u, v), κ = p, s is generated (S3) (S4). Ellipsometry angles Ψ (θ) and Δ (θ) for each incident angle θ are obtained from the amplitude reflection coefficient ratio == G ^p / G ^s = tanΨexp (iΔ). Data of many reflected lights can be collectively acquired to a hologram and processed by many lights with different incident angles θ included in the illumination light Q.