Shape measuring method, shape measuring device, detection method and detection device

摘要

In the shape measurement method, when irradiating light to a diffraction grating in which a plurality of grooves having a constant width are arranged in parallel with each other at a constant pitch, m-th order diffracted light included in the diffracted light generated by the diffraction grating is used. To detect. The pitch of the grooves is determined based on the diffraction angle of the mth order diffracted light. The depth of the groove is determined based on the amount of m-th order diffracted light.