POSITION MEASURING DEVICE, SHAPE MEASURING DEVICE AND POSITION MEASURING METHOD USING POSITION MEASURING DEVICE, AND SHAPE MEASURING METHOD USING POSITION MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a position measuring device, shape measuring device, position measuring method and shape measuring method of a measuring object.;SOLUTION: A position measuring device 10 includes: a support member 14; an optical fiber 11 fixed to the support member 14 at the upper end part and vertically arranged in a free state; a probe 12 provided on the lower end part of the optical fiber 11; an optical deflection detection mechanism 15 for detecting the deflection of the optical fiber 11 at the vertical direction intermediate position of the optical fiber 11; an XYZ stage 25 for mounting a measuring object 23 and moving the measuring object 23 in X axis, Y axis and Z axis directions; and a control part 26 of the optical deflection detection mechanism 15 and the XYZ stage 25. The optical fiber 11 is attached to the support member 14 through a vibration means 30 for swinging the optical fiber 11, the deflection amount of the optical fiber 11, when the probe 12 is abutted to the measuring object 23 mounted on the XYZ table 25, is detected in the optical deflection detection mechanism 15, and coordinates of the specified part of the measuring object 23 are detected.;COPYRIGHT: (C)2012,JPO&INPIT