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Optical chip ID definition using nanoimprint lithography
Optical chip ID definition using nanoimprint lithography
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机译:使用纳米压印光刻技术的光学芯片ID定义
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摘要
An optically readable chip ID is provided to an imprintable material that is formed as a last level of an integrated circuit (IC) chip using nanoimprint lithography. The nanoimprint lithography process provides an array of indentations into the imprintable material that is typically arranged in a hexadecimal pattern. The hexadecimal pattern includes one or more optically readable characters which combine to encode chip location identification data. The chip location identification data identifies a unique location of the product chip on a wafer prior to dicing.
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