Resistive switching memory stack for three-dimensional structure

摘要

A resistive switching memory stack is provided. The resistive switching memory stack includes a bottom electrode, formed from one or more conductors. The resistive switching memory stack further includes an oxide layer, disposed over the bottom electrode, formed from an Atomic Layer Deposition (ALD) of one or more oxides. The resistive switching memory stack also includes a top electrode, disposed over the oxide layer, formed from the ALD of a plurality of metals into a metal layer stack. An oxygen vacancy concentration of the resistive switching memory stack is controlled by (i) a thickness of the plurality of metals forming the top electrode and (ii) a percentage of a particular one of the plurality of metals in the metal layer stack of the top electrode.