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Tin-zinc microbump structures and method of making same

机译:锡锌微凸块结构及其制造方法

摘要

Techniques and mechanisms for providing effective connectivity with surface level microbumps on an integrated circuit package substrate. In an embodiment, different metals are variously electroplated to form a microbump which extends through a surface-level dielectric of a substrate to a seed layer including copper. The microbump includes a combination of tin and zinc that mitigates precipitation of residual copper by promoting the formation of miconstituents in the microbump. In another embodiment, the microbump has a mass fraction of zinc, or a mass fraction of tin, that is different in various regions along a height of the microbump.
机译:用于提供与集成电路封装基板上的表面级微凸点有效连接的技术和机制。在一个实施例中,不同的金属被不同地电镀以形成微凸块,该微凸块延伸穿过衬底的表面级电介质到达包括铜的种子层。微型凸块包括锡和锌的组合,可通过促进微型凸块中微量成分的形成来减轻残留铜的沉淀。在另一个实施例中,微型凸块具有沿着微型凸块的高度在各个区域中不同的锌的质量分数或锡的质量分数。

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