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Stretchable electronics fabrication method with strain redistribution layer

机译:具有应变再分布层的可伸缩电子制造方法

摘要

Embodiments of the invention include a microelectronic device and methods for forming a microelectronic device. In an embodiment, the microelectronic device includes a semiconductor die that has one or more die contacts that are each electrically coupled to a contact pad by a conductive trace. The semiconductor die may have a first elastic modulus. The microelectronic device may also include an encapsulation layer over the semiconductor die and the conductive trace. The encapsulation layer may have a second elastic modulus that is less than the first elastic modulus. The microelectronic device may also include a first strain redistribution layer within the encapsulation layer. The first strain redistribution layer may have a footprint that covers the semiconductor die and a portion of the conductive traces. The strain redistribution layer may have a third elastic modulus that is less than the first elastic modulus and greater than the second elastic modulus.
机译:本发明的实施例包括微电子器件和用于形成微电子器件的方法。在一个实施例中,微电子器件包括具有一个或多个管芯触点的半导体管芯,每个管芯触点通过导电迹线电耦合至接触垫。半导体管芯可以具有第一弹性模量。微电子器件还可包括在半导体管芯和导电迹线上的封装层。封装层可具有小于第一弹性模量的第二弹性模量。微电子器件还可在封装层内包括第一应变重新分布层。第一应变重新分布层可以具有覆盖半导体管芯和导电迹线的一部分的覆盖区。应变重新分布层可以具有第三弹性模量,该第三弹性模量小于第一弹性模量并且大于第二弹性模量。

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