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Terahertz detector using field-effect transistor

机译:使用场效应晶体管的太赫兹探测器

摘要

The purpose of the present invention is to provide a terahertz detector using a field-effect transistor capable of implementing high sensitivity by exhibiting an asymmetric characteristic only with a form of a source/drain and a gate. To this end, the present invention relates to the terahertz detector using a field-effect transistor comprising: a source formed by being doped on a portion of a silicon base; a channel formed so as to encompass the source on a plane; a drain formed outside the channel; a dielectric layer formed on an upper end of the source, the channel and the drain; and a gate located at an upper end of the dielectric layer, wherein when terahertz electromagnetic waves are applied through the gate, the intensity of the electromagnetic waves is detected using a current/voltage outputted from the source and the drain.
机译:本发明的目的是提供一种使用场效应晶体管的太赫兹检测器,该场效应晶体管能够仅通过以源极/漏极和栅极的形式表现出不对称特性来实现高灵敏度。为此,本发明涉及使用场效应晶体管的太赫兹检测器,该太赫兹检测器包括:通过掺杂在硅基底的一部分上而形成的源;以及通过掺杂在硅基底的一部分上而形成的源。形成为在平面上包围源的通道;在通道外部形成的排水口;在源极,沟道和漏极的上端形成的介电层;栅极位于介电层的上端,其中当通过栅极施加太赫兹电磁波时,使用从源极和漏极输出的电流/电压来检测电磁波的强度。

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