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Copper etchant solution additives and method for producing copper etchant solution

机译:铜蚀刻液添加剂及铜蚀刻液的制造方法

摘要

The present disclosure discloses a copper etchant solution additives and a method for producing copper etchant solution. The method includes: producing copper etchant solution additives, wherein the copper etchant solution additives is an inorganic solution with cupric ions (Cu2+), and deionized water is a solvent for the copper etchant solution additives and is electric neutrality; before wet-etching, the copper etchant solution additives is added in the copper etchant solution, and the copper etchant solution is with a cupric ions (Cu2+) concentration of 700-1000 ppm. Through the above method, the present disclosure can improve etchant property of copper etchant solution to increase etching rate and uniformity.
机译:本公开公开了一种铜蚀刻剂溶液添加剂和制备铜蚀刻剂溶液的方法。该方法包括:制备铜蚀刻剂添加剂,其中所述铜蚀刻剂添加剂为具有铜离子(Cu 2+)的无机溶液,去离子水为所述铜蚀刻剂添加剂的溶剂,并且为电中性。在湿法蚀刻之前,将铜蚀刻剂溶液添加剂添加到铜蚀刻剂溶液中,并且铜蚀刻剂溶液的铜离子(Cu2 +)浓度为700-1000 ppm。通过以上方法,本公开可以改善铜蚀刻剂溶液的蚀刻剂性质以增加蚀刻速率和均匀性。

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