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CONTACT RESISTANCE REDUCTION FOR ADVANCED TECHNOLOGY NODES
CONTACT RESISTANCE REDUCTION FOR ADVANCED TECHNOLOGY NODES
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机译:先进技术节点的接触电阻降低
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摘要
A source/drain contact includes a first portion arranged on a substrate and extending between a first gate and a second gate; a second portion arranged on the first portion and extending over the first gate and the second gate, the second portion including a partially recessed liner and a metal disposed on the partially recessed liner, and the partially recessed liner arranged on an endwall of the second portion and in contact with the first portion; and an oxide disposed around the second portion and on the first gate and the second gate.
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