首页> 外国专利> Method for transferring graphene by attaching removable frame to protective layer applied on a sample containing graphene monolayer

Method for transferring graphene by attaching removable frame to protective layer applied on a sample containing graphene monolayer

机译:通过将可移动框架附着到施加在含石墨烯单层样品上的保护层上来转移石墨烯的方法

摘要

A method of transferring graphene onto a target substrate having cavities and/or holes or onto a substrate having at least one water soluble layer is disclosed. It comprises the steps of: applying a protective layer (4) onto a sample comprising a stack (20) formed by a graphene monolayer (2) grown on a metal foil or on a metal thin film on a silicon substrate (1); attaching to said protective layer (4) a frame (5) comprising at least one outer border and at least one inner border, said frame (5) comprising a substrate and a thermal release adhesive polymer layer, the frame (5) providing integrity and allowing the handling of said sample; removing or detaching said metal foil or metal thin film on a silicon substrate (1); once the metal foil or metal thin film on a silicon substrate (1) has been removed or detached, drying the sample; depositing the sample onto a substrate (7); removing said frame (5) by cutting through said protective layer (4) at said at least one inner border of the frame (5) or by thermal release.
机译:公开了一种将石墨烯转移到具有腔和/或孔的目标衬底上或转移到具有至少一个水溶性层的衬底上的方法。它包括以下步骤:在包含由石墨烯单层( 2 形成的叠层( 20 )的样品上施加保护层( 4 ) )生长在硅基板( 1 )上的金属箔或金属薄膜上;将包括至少一个外边界和至少一个内边界的框架( 5 )附接到所述保护层( 4 ),所述框架( 5 >),其包括基材和热释放粘合剂聚合物层,框架( 5 )提供完整性并允许处理所述样品;去除或分离硅基板( 1 )上的所述金属箔或金属薄膜;除去或分离硅衬底( 1 )上的金属箔或金属薄膜后,干燥样品;将样品沉积到基板( 7 )上;通过在框架的至少一个内边界( 5 )上切穿保护层( 4 )来移除框架( 5 )或通过热释放。

著录项

  • 公开/公告号US10192736B2

    专利类型

  • 公开/公告日2019-01-29

    原文格式PDF

  • 申请/专利权人 GRAPHENEA S.A.;

    申请/专利号US201615220234

  • 申请日2016-07-26

  • 分类号H01L21/02;B32B37;B32B38;B32B38/10;B81C1;C01B32/194;

  • 国家 US

  • 入库时间 2022-08-21 12:10:02

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