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FIELD-EFFECT TRANSISTOR, BIOSENSOR COMPRISING THE SAME, METHOD OF MANUFACTURING FIELD-EFFECT TRANSISTOR, AND METHOD OF MANUFACTURING BIOSENSOR
FIELD-EFFECT TRANSISTOR, BIOSENSOR COMPRISING THE SAME, METHOD OF MANUFACTURING FIELD-EFFECT TRANSISTOR, AND METHOD OF MANUFACTURING BIOSENSOR
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机译:场效应晶体管,包括该场效应晶体管的生物传感器,制造场效应晶体管的方法以及制造生物传感器的方法
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摘要
Provided is a field-effect transistor that can reduce noise, be produced by a simplified manufacturing method, and also have a plurality of active patterns and gate patterns designed to be combinable according to a detection purpose. The field-effect transistor includes a lower silicon layer and a buried oxide layer disposed on the lower silicon layer; an active pattern disposed on the buried oxide layer and including a channel region, a source region, and a drain region; a gate pattern disposed on the active pattern to at least partially overlap the active pattern; a source electrode disposed in direct contact with the source region on the active pattern, and a drain electrode disposed in direct contact with the drain region on the active pattern; and a gate insulating film disposed between the active pattern and the gate pattern.
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