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PREDICTIVE MODELING OF METROLOGY IN SEMICONDUCTOR PROCESSES
PREDICTIVE MODELING OF METROLOGY IN SEMICONDUCTOR PROCESSES
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机译:半导体过程中计量学的预测建模
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摘要
Implementations described herein generally relate to improving silicon wafer manufacturing. In one implementation, a method includes receiving data from one or more manufacturing tools about a manufacturing process of a silicon wafer. The method further includes determining, based on the data, predictive information about a quality of the silicon wafer. The method further includes providing the predictive information to a manufacturing system, wherein the predictive information is used to determine whether to take corrective action.
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