NIST List of Publications LP 103, March 1999. National Semiconductor Metrology211 Program, Semiconductor Electronics Division

摘要

This List of Publications includes all papers relevant to semiconductor211u001etechnology published by NIST staff, including work of the National Semiconductor 211u001eMetrology Program, the Semiconductor Electronics Division, and other parts of 211u001eNIST having independent interests in semiconductor metrology. Bibliographic 211u001einformation is provided for publications from 1990 through 1998. Within each 211u001eyear, citations of published papers are listed alphabetically by first author. 211u001eIndexes are provided by topic area and by author. Publications are referred to in 211u001ethe Topic and Author Indexes according to publication year and citation number 211u001e(e.g. 98-3 refers to the third publication in the year 1998). A listing of 211u001esoftware available from the Semiconductor Electronics Division is given on page 211u001e87 along with contacts for additional information and for copies of the computer 211u001eprograms. Publications covering the period from 1962 through 1989 prior to 1990 211u001eare found in a separate list, NIST List of Publications LP 72, Semiconductor 211u001eMeasurement Technology, which contains bibliographies and a listing of software, 211u001evideotapes, and progress reports.