首页> 外国专利> ELECTROTHERMALLY ACTUATED MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE PROVIDING INCREASED EFFICIENCY

ELECTROTHERMALLY ACTUATED MICROELECTROMECHANICAL AND/OR NANOELECTROMECHANICAL STRUCTURE PROVIDING INCREASED EFFICIENCY

机译:电热致动的微机电和/或纳米机电结构可提高效率

摘要

An electrothermally actuated microelectromechanical and/or nanoelectromechanical structure including a stationary portion, at least one portion which is movable relative to the stationary portion, at least one electrothermal actuation beam which makes it possible to cause an electric current to flow from the stationary portion to the movable portion, is mechanically connected to the movable portion and is intended to move the movable portion relative to the stationary portion by electrothermal actuation, and at least one electrically conductive connection element electrically connecting the movable portion to the stationary portion, the actuation beam having a thickness of no greater than half one thickness of the movable portion and no greater than half one thickness of the connection element.
机译:一种电热致动的微机电和/或纳米机电结构,其包括固定部分,相对于固定部分可移动的至少一个部分,至少一个电热致动梁,该电热致动梁可以使电流从固定部分流向电极。可移动部分机械地连接到可移动部分,并且旨在通过电热致动使可移动部分相对于固定部分移动,并且至少一个导电连接元件将可移动部分电连接到固定部分,该致动梁具有一个厚度不大于可动部分的一半厚度且不大于连接元件的一半厚度。

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