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Methods and Devices for Detecting Open and/or Shorts Circuits in MEMS Micro-Mirror Devices
Methods and Devices for Detecting Open and/or Shorts Circuits in MEMS Micro-Mirror Devices
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机译:用于检测MEMS微镜器件中的开路和/或短路的方法和设备
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摘要
According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits.
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