VAPOR DEPOSITION METHOD, VAPOR DEPOSITION APPARATUS, EL DEVICE PRODUCTION APPARATUS, AND EL DEVICE PRODUCTION METHOD

摘要

Provided is a vapor deposition method including: a fixing step for fixing a vapor deposition mask (3) on a mask frame (2); a raising step for placing a substrate (4) on the vapor deposition mask (3) and raising the mask frame (2) such that the substrate (4) comes into contact with a touch plate (5) disposed above the mask frame (2); and a measuring step for measuring the thickness of the mask frame (2). In the raising step, the amount the mask frame (2) is raised is determined on the basis of the thickness of the mask frame (2) measured by the measuring step.