SOURCE AND MEASUREMENT UNIT FOR MEASURING SEMICONDUCTOR DEVICE

摘要

The present invention provides a source and measurement unit for measuring a semiconductor device, wherein the unit is manufactured as a CMOS integrated circuit, has a bipolar characteristic enabling operation in a positive polarity and a negative polarity in order to implement a source function and a sink function, employs a digital-to-analog conversion technology and an analog-to-digital conversion technology, converts unipolar setting data into a bipolar setting value and measures the converted bipolar setting value, and converts a bipolar measurement result into a unipolar measurement value.