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A SILICON MULTI-MODE CORIOLIS VIBRATORY GYROSCOPES HAVING HIGH ORDER ROTATIONALLY SYMMETRIC MECHANICAL STRUCTURE AND 32 ELECTRODES
A SILICON MULTI-MODE CORIOLIS VIBRATORY GYROSCOPES HAVING HIGH ORDER ROTATIONALLY SYMMETRIC MECHANICAL STRUCTURE AND 32 ELECTRODES
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机译:具有高阶旋转对称机械结构和32个电极的硅多模圆弧振动陀螺仪
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摘要
An angular sensor, comprising a Coriolis vibratory gyroscope (CVG) resonator, capable of oscillating along a first pair of normal n=1 modes comprising a first normal mode and a second normal mode; and a second pair of normal n=2 modes comprising a third normal mode and a fourth normal mode; the sensor further comprising one drive electrode and one sense electrode aligned along an anti-nodal axis of each mode; and a pair of bias tune electrodes aligned with an anti-nodal axis of each mode if no drive and sense electrode pair is aligned with said anti-nodal axis.
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