DISPLAY PANEL, DISPLAY DEVICE AND PREPARATION METHOD OF LOW TEMPERATURE POLY-SILICON THIN FILM TRANSISTOR

摘要

The invention provides a display panel, a display device and a preparation method of a low temperature poly-silicon thin film transistor (LTPS-TFT). The preparation method comprises: providing a base substrate; forming a semiconductor layer on the base substrate; forming a first insulating layer on the semiconductor layer; forming a first metal layer on the first insulating layer and patterning the first metal layer to obtain a first metal gate layer; forming a second insulating layer on the first metal layer; forming a second metal layer on the second insulating layer and patterning the second metal layer to obtain a second metal gate layer, wherein the first metal gate layer and the second metal gate layer are connected; forming a third insulating layer on the second metal layer; forming a third metal layer on the third insulating layer and patterning the third metal layer to form a source and a drain, wherein the source and the drain are connected to the semiconductor layer. The LTPS technology of the present invention can be applied to the production of large-sized panels.