METHOD FOR PRODUCING TRICHLOROSILANE AND DEVICE FOR PRODUCING TRICHLOROSILANE

摘要

This production method is a method for producing trichlorosilane, wherein a lead-in flow path (f1), a lead-out flow path (f2), a discharge flow path (f31), and a discharge flow path (f32) through which a metallic silicon powder passes in a trichlorosilane production system are opened/closed by using non-slide valves (b1-b4) each including a valve body provided rotatably to a valve seat in a non-contact state.