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METHOD FOR PRODUCING TRICHLOROSILANE AND DEVICE FOR PRODUCING TRICHLOROSILANE
METHOD FOR PRODUCING TRICHLOROSILANE AND DEVICE FOR PRODUCING TRICHLOROSILANE
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机译:三氟硅氧烷的制备方法及三氟硅氧烷的制备装置
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摘要
A production method is a method for producing trichlorosilane, the method including opening and closing, with use of a non-sliding valve (b1 to b4), an entry channel (f1), an exit channel (f2), a discharge channel (f31), and a discharge channel (f32) through each of which metallurgical grade silicon powder flows in a system for producing the trichlorosilane, the non-sliding valve including a valve body capable of being rotated without coming into contact with a valve seat.
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