Method for producing trichlorosilane and apparatus for producing trichlorosilane

摘要

The manufacturing method is a method for producing trichlorosilane, in which the metal silicon powder flows in the production system of trichlorosilane, the introduction flow passage f1, the discharge flow passage f2, the discharge flow passage f31, and the discharge flow passage f32 The opening and closing of the valve is performed using non-contact valves b1 to b4 having a valve body that is rotatably provided in a non-contact state with respect to the valve seat.