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ALKALI-FREE BOROSILICATE GLASSES WITH LOW POST-HF ETCH ROUGHNESS
ALKALI-FREE BOROSILICATE GLASSES WITH LOW POST-HF ETCH ROUGHNESS
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机译:无碱蚀刻后低碱度的无碱硼硅酸盐玻璃
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摘要
An article comprises a glass substrate. The glass substrate has a first surface having a plurality of vias therein, and a second surface parallel to the first surface. At least one of the first surface and the second surface is an etched surface having a surface roughness (Ra) of 0.75 nm or less. The glass substrate comprises, in mol percent on an oxide basis: 65 mol% ≤ SiO2 ≤ 75 mol%; 7 mol% ≤ Al2O3 ≤ 15 mol%; 26.25 mol% ≤ RO + Al2O3 - B2O3; 0 mol% ≤ R2O ≤ 2 mol%. RO = MgO + CaO + SrO + BaO + ZnO. R2O = Li2O + Na2O + K2O + Rb2O + Cs2O.
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机译:制品包括玻璃基板。玻璃基板具有在其中具有多个通孔的第一表面和与第一表面平行的第二表面。第一表面和第二表面中的至少一个是具有0.75nm或更小的表面粗糙度(Ra)的蚀刻表面。所述玻璃基板包含以摩尔%计基于氧化物的:65摩尔%≤SiO 2 Sub>≤75摩尔%; 7mol%≤Al 2 Sub> O 3 Sub>≤15 mol%; 26.25 mol%≤RO + Al 2 Sub> O 3 Sub>-B 2 Sub> O 3 Sub>; 0 mol%≤R 2 Sub> O≤2 mol%。 RO = MgO + CaO + SrO + BaO + ZnO。 R 2 Sub> O = Li 2 Sub> O + Na 2 Sub> O + K 2 Sub> O + Rb 2 < / Sub> O + Cs 2 Sub> O。
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