Alkali free borosilicate glasses with low roughness after HF etching

摘要

The article has a glass substrate.The glass substrate has a first surface having a plurality of vias therein and a second surface parallel to the first surface.At least one of the first and second surfaces is an etching surface having a surface roughness (RA) of 0.75 nm or less.The glass substrate has a molar percentage of the oxide reference, 65 mole% 7 mole% 26.25 mole% Contains 0 mol% LGR; R2 le; 2 mol%.Ro = MgO + CaO + SRO + Bao + ZnO.R2O = Li2O + Na2O + K2O + rb2o + Cs2O.