BIPOLAR ELECTROSTATIC CHUCK HAVING ELECTRODE ON PORTION THEREOF

摘要

Disclosed is a bipolar electrostatic chuck. The bipolar electrostatic chuck includes: a base; a lower dielectric layer formed on an entire upper surface of the base; an edge electrode part formed along a rim on an upper side of the lower dielectric layer, the edge electrode part including a first electrode and a second electrode, which is spaced apart from the first electrode and has a polarity different from a polarity of the first electrode; and an upper dielectric layer formed on an upper side of the lower dielectric layer and the edge electrode part, wherein, in a plan view, the bipolar electrostatic chuck is divided into an edge electrode forming area, which corresponds to an area from edges to the edge electrode part, and a central area, which corresponds to an area other than the edge electrode forming area.