OPTICAL MASK PLATE, AND METHOD FOR PREPARING OPTICAL MASK SUBSTRATE BASED ON OPTICAL MASK PLATE

摘要

Provided are an optical mask plate (400) and a method for preparing an optical mask substrate (200) based on the optical mask plate (400). The optical mask plate (400) comprises a light-transmitting region (420) and a light-blocking region (410), wherein the light-transmitting region (420) has a designated pattern (1001), the designated pattern comprises (1001) at least one unit pattern, and the unit pattern is configured to be spliced to form at least two target patterns (1002). The optical mask plate (400) can be used to prepare a variety of different optical mask substrates (200), thereby increasing the universality.