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METHOD FOR DETECTING THE FRACTURE OF A SUBSTRATE WEAKENED BY IMPLANTATION OF ATOMIC SPECIES

机译:检测通过注入原子物种而弱化的基质断裂的方法

摘要

The invention relates to a method for monitoring a thermal treatment applied to a substrate comprising an area of weakness formed by implantation of atomic species in order to fracture said substrate along said weakened area, the substrate (S) being arranged in a heating chamber (11), characterized in that it comprises a recording of the sound inside or in the vicinity of the heating chamber (11) and the detection, in said recording, of a sound emitted by the substrate (S) when it fractures along the weakened area. The invention also relates to a device for the thermal treatment of a batch of substrates, comprising an annealing furnace (1) comprising a heating chamber (11) designed to receive said batch, at least one microphone (3) configured to record the sounds inside or in the vicinity of the heating chamber (11), and a treatment system configured to detect, using a sound recording produced by said microphone, a sound emitted by a fracture of a substrate.
机译:本发明涉及一种用于监测施加到基板上的热处理的方法,该基板包括通过注入原子种类而形成的弱化区域,以便沿所述弱化区域使所述基板断裂,该基板(S)布置在加热室(11)中。 ),其特征在于,它包括记录加热室(11)内部或附近的声音,以及在所述记录中检测衬底(S)沿弱化区域破裂时发出的声音。本发明还涉及一种用于对一批基板进行热处理的设备,该设备包括:退火炉(1),其包括设计成接收所述一批的加热室(11);至少一个麦克风(3),其被配置为记录内部的声音处理系统,该处理系统被配置为使用由所述麦克风产生的声音记录来检测由基板的破裂所发出的声音。

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