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METHOD FOR DETECTING THE FRACTURE OF A SUBSTRATE WEAKENED BY IMPLANTATION OF ATOMIC SPECIES
METHOD FOR DETECTING THE FRACTURE OF A SUBSTRATE WEAKENED BY IMPLANTATION OF ATOMIC SPECIES
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机译:检测通过注入原子物种而弱化的基质断裂的方法
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摘要
The invention relates to a method for monitoring a thermal treatment applied to a substrate comprising an area of weakness formed by implantation of atomic species in order to fracture said substrate along said weakened area, the substrate (S) being arranged in a heating chamber (11), characterized in that it comprises a recording of the sound inside or in the vicinity of the heating chamber (11) and the detection, in said recording, of a sound emitted by the substrate (S) when it fractures along the weakened area. The invention also relates to a device for the thermal treatment of a batch of substrates, comprising an annealing furnace (1) comprising a heating chamber (11) designed to receive said batch, at least one microphone (3) configured to record the sounds inside or in the vicinity of the heating chamber (11), and a treatment system configured to detect, using a sound recording produced by said microphone, a sound emitted by a fracture of a substrate.
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